SECS/GEM半导体协议介绍

SECS/GEM半导体标准 介绍视频

标准

该标准（也称为 SECS-II 消息规范）与协议层配合使用，用于定义消息在设备和主机之间的通信方式。本标准中定义的功能支持IC制造所需的最典型活动。与其他 SECS/GEM 标准一起，SEMI E5 有助于定义用于监视和控制制造设备的软件界面。 

SEMI设备通信标准第2部分（SECS-II）定义了智能设备和主机之间交换的消息的解释细节。本规范是与日本电子工业发展协会设备通信委员会12合作制定的。 

本标准旨在与SEMI E4设备通信标准（SECS-I）完全兼容。它还旨在允许与备用邮件传输协议兼容。消息传输协议要求的详细信息包含。 

本标准旨在将消息定义到如此详细的程度，以便只需对单个设备知之甚少即可构建一些一致的主机软件。反过来，设备可以在对主机的最低限度的了解下构建。 

标准中定义的消息支持IC制造所需的最典型活动。该标准还规定了特定于设备的电文的定义，以支持标准电文未涵盖的活动。虽然某些活动可以由主机中的通用软件处理，但预计可能需要特定于设备的主机软件来支持设备的全部功能。

 SECS-II为设备和主机之间使用消息传输协议（如SECS-I）交换的消息提供了形式和含义。

 SECS-II定义了以消息形式在设备和主机之间传递信息的方法。这些消息被组织到称为流的活动类别中，其中包含称为函数的特定消息。对信息和相应数据传输的请求就是这种活动的一个例子。

 SECS-II将消息的结构定义为称为项目和项目列表的实体。此结构允许自描述数据格式，以保证对消息的正确解释。

 消息的交换由一组用于处理消息的规则（称为事务协议）控制。事务协议对任何 SECS-II 实现都提出了一些最低要求。

对象

该规范定义了用于基本半导体制造设备的SECS-II消息的标准实施框架。通过围绕数据收集、报警管理、远程控制、配置和控制定义一组通用的设备行为和通信功能，本标准允许设备供应商开发单个SECS-II接口，为主机自动化提供坚实的基础。它还允许设备制造商在通用的行业框架内实施独特的自动化解决方案。这种标准化降低了设备供应商和设备制造商的软件开发成本，从而使设备制造商能够更快，更有效地实现半导体工厂的自动化。

GEM为所有半导体制造设备定义了SECS-II的标准实施。GEM标准定义了一组通用的设备行为和通信功能，这些功能和灵活性为支持半导体设备制造商的制造自动化程序提供支持。设备供应商可以提供 GEM 中未包含的其他 SECS-II 功能，只要该附加功能不与 GEM 中定义的任何行为或功能冲突。此类添加可能包括 SECS-II 消息、收集事件、警报、远程命令、处理状态、可变数据项（数据变量、状态变量或设备常量）或特定于某个类（蚀刻器、步进器等）或特定设备实例的其它功能。

GEM旨在为设备制造商和设备供应商带来经济效益。设备供应商受益于开发和销售满足大多数客户的单个SECS-II接口的能力。设备制造商受益于所有制造设备中 SECS-II 接口的增强功能和标准化。这种标准化降低了设备供应商和设备制造商的软件开发成本。通过降低成本和增加功能，设备制造商可以更快、更有效地实现半导体工厂的自动化。GEM标准提供的灵活性还使设备制造商能够在共同的行业框架内实施独特的自动化解决方案。

GEM标准旨在规定以下内容：

• 半导体制造设备在SECS-II通信环境中表现出的行为模型，

• 描述半导体制造环境中所需的信息和控制功能，

• 定义半导体制造设备的基本SECS-II通信能力，

• 当 SECS-II 提供多种可能的方法时，完成操作的单一一致方法，以及

• 实现有用的通信能力所必需的标准信息对话。

GEM标准包含两种类型的要求：

创业板的基本要求构成了创业板标准的基础。其他 GEM 功能提供某些类型的工厂自动化所需的功能或适用于特定类型设备的功能。有关 GEM 基本要求和其他 GEM 功能的详细列表，请参见第 11 条，GEM 合规性。图1说明了GEM标准的组成部分。

设备供应商应与其客户合作，确定应为特定类型的设备实施哪些额外的 GEM 功能。由于GEM标准中定义的功能是专门为满足半导体制造商的工厂自动化要求而开发的，因此预计大多数设备制造商将需要适用于特定类型设备的大部分GEM功能。一些设备制造商可能不需要所有的 GEM 功能，因为他们的工厂自动化策略不同。

GEM标准的范围仅限于定义通过通信链路查看的半导体设备的行为。SEMI E5 （SECS-II） 标准提供了主机和设备之间交换的消息和相关数据项的定义。GEM标准定义了应使用哪些SECS-II报文，在什么情况下使用，以及由此产生的活动应该是什么。

Abstract

This Specification defines a standard implementation framework of SECS-II messages for basic semiconductor manufacturing equipment. By defining a common set of equipment behavior and communications capabilities around data collection, alarm management, remote control, configuration and control, this Standard allows equipment suppliers to develop a single SECS-II interface that provides a solid foundation for host automation. It also allows device manufacturers to implement unique automation solutions within a common industry framework. This standardization reduces the cost of software development for both equipment suppliers and device manufacturers, which would in turn allow device manufacturers to automate semiconductor factories more quickly and effectively.

GEM defines a standard implementation of SECS-II for all semiconductor manufacturing equipment. The GEM Standard defines a common set of equipment behavior and communications capabilities that provide the functionality and flexibility to support the manufacturing automation programs of semiconductor device manufacturers. Equipment suppliers may provide additional SECS-II functionality not included in GEM as long as the additional functionality does not conflict with any of the behavior or capabilities defined in GEM. Such additions may include SECS-II messages, collection events, alarms, remote commands, processing states, variable data items (data variables, status variables or equipment constants), or other functionality that is unique to a class (etchers, steppers, etc.) or specific instance of equipment.

GEM is intended to produce economic benefits for both device manufacturers and equipment suppliers. Equipment suppliers benefit from the ability to develop and market a single SECS-II interface that satisfies most customers. Device manufacturers benefit from the increased functionality and standardization of the SECS-II interface across all manufacturing equipment. This standardization reduces the cost of software development for both equipment suppliers and device manufacturers. By reducing costs and increasing functionality, device manufacturers can automate semiconductor factories more quickly and effectively. The flexibility provided by the GEM Standard also enables device manufacturers to implement unique automation solutions within a common industry framework.

The GEM Standard is intended to specify the following:

• A model of the behavior to be exhibited by semiconductor manufacturing equipment in a SECS-II communication environment,

• A description of information and control functions needed in a semiconductor manufacturing environment,

• A definition of the basic SECS-II communications capabilities of semiconductor manufacturing equipment,

• A single consistent means of accomplishing an action when SECS-II provides multiple possible methods, and

• Standard message dialogues necessary to achieve useful communications capabilities.

The fundamental GEM requirements form the foundation of the GEM Standard. The additional GEM capabilities provide functionality required for some types of factory automation or functionality applicable to specific types of equipment. A detailed list of the fundamental GEM requirements and additional GEM capabilities can be found in § 11, GEM Compliance. Figure 1 illustrates the components of the GEM Standard.

Equipment suppliers should work with their customers to determine which additional GEM capabilities should be implemented for a specific type of equipment. Because the capabilities defined in the GEM Standard were specifically developed to meet the factory automation requirements of semiconductor manufacturers, it is anticipated that most device manufacturers will require most of the GEM capabilities that apply to a particular type of equipment. Some device manufacturers may not require all the GEM capabilities due to differences in their factory automation strategies.

The scope of the GEM Standard is limited to defining the behavior of semiconductor equipment as viewed through a communications link. The SEMI E5 (SECS-II) Standard provides the definition of messages and related data items exchanged between host and equipment. The GEM Standard defines which SECS-II messages should be used, in what situations, and what the resulting activity should be.