FAB metrology

Semiconductor metrology is a critical discipline in the production of high performance, reliable metrology tools and devices. Whether verifying that a design will be manufacturable, characterizing a new process, or monitoring high-volume manufacturing processes, our comprehensive set of optical metrology solutions and tools, as well as analysis and process window optimization solutions, gives IC manufacturers the ability to maintain tight control of their processes.

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Overlay Metrology Solutions and Tools

Archer Series: Overlay registration metrology solutions

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Archer 500LCM: Dual imaging- and scatterometry-based measurement modules provide high performance and cost-effective characterization of overlay error for advanced processes at the 2Xnm/1Xnm design nodes.

Archer 500: Imaging-based overlay metrology system used for development and high volume manufacturing of advanced patterning processes at the 2Xnm/1Xnm design nodes.

Optical CD Metrology Solutions and Tools

SpectraShape: Optical critical-dimension (CD) and shape metrology solutions

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Film Thickness / Index Metrology Solutions and Tools

SpectraFilm Family: Film thickness, refractive index (RI) and stress metrology tools for leading-edge applications

Aleris Family: Film thickness, refractive index (RI), stress and composition metrology solutions for leading-edge applications

Surfscan SPx: Integrated SURFmonitor metrology module provides full-wafer maps that correlate to film properties, for blanket films

Wafer Metrology, Geometry and Topography Solutions

WaferSight PWG: Wafer thickness, shape and flatness metrology solutions

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Surfscan SPx: Integrated SURFmonitor metrology module indicates sub-Angstrom surface topography variation on blanket films and bare substrates

Implant and Anneal Metrology Solutions

ThermaProbe: Implant and anneal metrology solutions

Surface Profiling Solutions

HRP-x50: Automated, stylus-based wafer surface profilers for topographic surface metrology

Resistivity

RS-x00: Sheet resistance mapping solutions

Reticle Pattern Placement Metrology Solutions and Tools

IPRO Series: Reticle pattern placement metrology solutions

All Surface Inspection and Metrology Tools

CIRCL:  Inspection, metrology and review cluster solutions for all wafer surfaces

Data Management Tools

5D Analyzer: Advanced data analysis solution supporting a wide range of metrology systems

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